- All sections
- G - Physics
- G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; materials therefor; originals therefor; apparatus specially adapted therefor
- G03F 1/64 - Pellicles or pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material thereof
Patent holdings for IPC class G03F 1/64
Total number of patents in this class: 487
10-year publication summary
22
|
34
|
30
|
61
|
39
|
52
|
45
|
60
|
56
|
17
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Shin-Etsu Chemical Co., Ltd. | 5132 |
90 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
84 |
ASML Netherlands B.V. | 6816 |
61 |
Mitsui Chemicals, Inc. | 3134 |
44 |
Nippon Light Metal Company, Ltd. | 645 |
31 |
Samsung Electronics Co., Ltd. | 131630 |
29 |
Boe Technology Group Co., Ltd. | 35384 |
12 |
ASML Holding N.V. | 542 |
9 |
Intel Corporation | 45621 |
7 |
Korea Electronics Technology Institute | 1358 |
7 |
Ordos Yuansheng Optoelectronics Co., Ltd. | 1232 |
6 |
Air Water Inc. | 135 |
5 |
Fine Semitech Corp. | 22 |
5 |
IMEC VZW | 1410 |
5 |
Photronics, Inc. | 47 |
5 |
Research & Business Foundation Sungkyunkwan University | 1640 |
5 |
Asahi Kasei E-materials Corporation | 222 |
4 |
Lintec of America, Inc. | 158 |
4 |
Samsung Display Co., Ltd. | 30585 |
3 |
Applied Materials, Inc. | 16587 |
3 |
Other owners | 68 |